Description
🔹 Overview
The Zygo-FPM G3.5HS2 3D profiler, manufactured by Toho Technology Co., Ltd. (Japan), integrates Zygo’s Full Phase Measurement (FPM) interferometric heads for ultra-precise non-contact surface height inspection.
It is widely used in semiconductor wafer inspection, IC packaging, MEMS structure measurement, and optical component surface characterization.
🔹 Technical Specifications
| Item | Specification |
|---|---|
| Equipment Name | Column Height Inspection System |
| Model | Zygo-FPM G3.5HS2 |
| Manufacturer | Toho Technology Co., Ltd. (Japan) |
| Interferometer Head | Zygo FP50X / FP1.5X / FP2X |
| Measurement Type | Full Phase Measurement (FPM) Interferometry |
| Control System | Industrial PC + Zygo Controller + Electrical Cabinet |
| Dimensions (W×D×H) | 1900 × 2300 × 2453 mm |
| Weight | 4000 kg |
| Manufacture Date | Nov. 1, 2012 |
| Serial Number | 10120023 |
| Equipment ID | CIPS12 |
| Power Supply | AC 200–220V, 3-phase |
| Application Fields | Semiconductor / MEMS / Optical Metrology |
🔹 Features
-
Granite base for ultra-stable mechanical rigidity
-
Multiple interchangeable Zygo interferometer heads (FP50X, 1.5X, 2X)
-
Nanometer-resolution linear stages with air-bearing system
-
Automated X-Y-Z scanning platform with precision feedback
-
Integrated industrial controller and dedicated electrical cabinet
