Description
The Celerity VDM series provides advanced vapor generation and delivery for liquid precursors used in CVD, ALD, and PECVD systems.
These modules ensure uniform vaporization, precise flow control, and easy integration through Ethernet or analog/digital I/O communication.
Back Panel Ports:
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INPUT/OUTPUT (DB25)
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DIAG test port
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Ethernet connection
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Tank Drain with compression fitting
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250VAC 3A Fuse socket
Condition (English):
Unit in clean cosmetic condition with intact ports and labeling.
Power and communication interfaces tested OK. Suitable for integration or spare use.Applications:
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Semiconductor process tools (CVD, ALD, PECVD)
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Flat panel display and optical film deposition
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Thin film and nanomaterial growth
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Laboratory vapor delivery experiments
